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It is challenging to schedule time-constrained cluster tools subject to activity time variation. With the help of their Petri net model, a real-time control policy is used to offset the activity time variation. Based on it, the schedulability conditions and scheduling algorithms are presented for single-arm cluster tools. The schedulability conditions can be analytically checked. Algorithms are developed...
With wafer residency time constraints, it is crucial to schedule a cluster tool in semiconductor fabrication such that the wafer sojourn time in a processing module is in a given range. However, because of the activity time variation in wafer fabrication by cluster tools, a feasible schedule obtained under the assumption of deterministic activity times may become infeasible. To solve this problem,...
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