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We present a novel 3.3-$\mu \text{m}$ radius ring modulator design with dramatically reduced resonance wavelength variations. By implementing a multi-mode waveguide design for the ring waveguides, phase errors from processing non-idealities in waveguide width and etching depth are significantly reduced. Measured resonance wavelengths from four 200-mm wafers fabricated in a commercial 130-nm CMOS...
We discuss titanium dioxide material development for CMOS compatible fabrication and integration of athermal silicon photonic components. Titanium dioxide overclad ring modulators achieved athermal operation (< 0.2 GHz/°C).
We investigated the system performance of variable slowlight buffers based on cascaded silica micro-resonator-rings. Continuous tunable buffering to wavelengths of choice is achieved, without losing any packets in an optical packet switching network.
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