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As a core functional material in acoustic resonators and filters, the elasticity of aluminum nitride (AlN) piezoelectric thin film and its correlated intrinsic properties deserve priority attention. This paper presents an in‐depth investigation of elastic softening and stiffening effect induced by stress loading in AlN piezoelectric thin film. Based on the Born‐Lande equation, the physical mechanism...
Stretchable electronics have attracted tremendous attention amongst academic and industrial communities due to their prospective applications in personal healthcare, human‐activity monitoring, artificial skins, wearable displays, human‐machine interfaces, etc. Other than mechanical robustness, stable performances under complex strains in these devices that are not for strain sensing are equally important...