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The operation speed and tracking accuracy of piezoelectric tube actuators in scanning probe microscopy is significantly reduced due to the excitation of the scanner eigenfrequencies by the driving voltages. Feedback control is a suitable method for vibration suppression but suffers from the required additional sensor equipment and high cost for generation of a displacement feedback signal. Operating...
This article presents an extended modeling approach for piezoelectric tube actuators combining finite element analysis (FEA) and model order reduction (MOR) techniques. The model includes the full coupling between motion in all axes, while the reduced model order, which depends mainly on the desired bandwidth and model accuracy, makes it a suitable basis for controller design purposes. Simulation...
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