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A cross-shaped piezoelectric motor with length of 43mm and diameter of 11 mm was proposed in this paper. Two third bending modes were used to generate ellipse trajectory at the driving foot located at the vibrator's center. Sixteen pieces of piezoelectric ceramic plates with sizes of 5mm×3mm×1mm were used to excite two third bending modes. Sine and cosine voltages with effective value of 100V at the...
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