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Blue InGaN micro-size light emitting diodes (LEDs) with diameters from 3 to 70μm have been fabricated. An ion implantation technique and a 12μm electro-ridge were used to simplify the fabrication processes. The 3–70μm LEDs exhibiting a large emission of photon blue shift (40–240meV) were observed in electro-luminescence (EL) spectra. The dependence of the blue shift on size is studied. The characteristics...
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