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A new type of compact excimer lamp has been developed using a piezoelectric transformer (PT) which employs the excitation of dielectric barrier discharge (DBD) in a He-Xe (10.8%) mixture. To investigate the vacuum ultraviolet emission characteristics, a spectroscopic measurement is performed for the He-Xe DBD generated by the PT. The emission peak is observed at 172 nm in a high gas-pressure region,...
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