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A three-dimensional (3D) PN junction capacitor for passive device integration (PDI) on silicon is discussed in this paper. The embedded capacitor with low parasitic inductor and high-reliability structure is a key technology for achieving effective micro-system integration for embedded passive technology and is widely used for a broad range of applications including filtering, tuning and power-bus...
Rapidly growing performance and mixed-signal integration is driving the need for product component miniaturization in electronics applications. Embedded passive technology is a potentially attractive solution to replace discrete passives. Embedded capacitors are widely used for broad range of applications including filtering, tuning and power-bus decoupling in the substrate. Micro-Electron-Mechanical...
This paper discusses a novel quasi-three-dimensional PN Junction capacitor, which has a high density of capacitance (200nF/cm2) with a relatively high working frequency (3GHz). These properties are because of its unique trench structure. To identify the performance of this kind of capacitor, some tests were carried out at both low frequency and high frequency. Moreover, a typical power supply filter...
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