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In low-pressure capacitive discharges the concept of Nonlinear Electron Resonance Heating (NERH) becomes important to enhance Ohmic dissipation. Particularly in geometrically asymmetric capacitive discharges (generation of a DC self-bias), the nonlinearities of the boundary plasma sheaths lead to a strongly non-sinusoidal radio frequency current. The Fourier spectra of such a current can indicate...
In capacitively coupled radio frequency (CCRF) discharges at low pressures the electron heating is dominated by electron interaction with the plasma sheath. Especially the beams of the highly energetic electrons (of which the energy is much higher than the ionization threshold of the background gas), accelerated by the expanding plasma sheaths, play a major role to sustain the plasma. At very low...
This paper proposes an effective nonlinear model which derives from a mathematically demanding spatially resolved model by means of concentrating on the fundamental mode. Based on the obtained mode the interaction of the linear bulk and the nonlinear boundary sheath is analyzed. Comparing the results to traditional linear theory shows that nonlinear effects highly complicate the interaction of bulk...
In capacitive radio frequency discharges operated at gas pressures below 20 mTorr two mechanisms of electron heating play a major role: i) ohmic heating due to collisions of electrons with neutrals of the background gas and ii) stochastic heating - often referred to as Fermi heating - due to momentum transfer from the oscillating boundary sheath. In this contribution we show that the plasma series...
The stochastic heating of electrons by the radio frequency boundary sheath in capacitively coupled plasmas is not completely understood or at least agreed upon by researchers. To aid in understanding this phenomena, a conceptually simple simulation of electron heating is presented. A fluid model is used to calculate the electric fields in the discharge, and a Monte Carlo simulation is used to calculate...
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