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In this work, we show the fabrication of nanocrescent arrays with different sizes. We also investigate the optical response of such nanocrescent arrays and perform theoretical calculations. Our approach may find extensive applications in nanophotonics and integrated optics.
Laser anneal (LA) is one of major millisecond anneal techniques (MSA) for forming ultra-shallow and highly activated junctions. There are two major commercially available laser anneal systems which are called laser spike annealing (LSA) and dynamic surface annealing (DSA) respectively. LSA and DSA are quite different in terms of laser source, wavelength, scanning mode and so on, their hardware and...
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