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WO 3 -based thin film micro-gas sensors coated with V 2 O 5 layers were fabricated and NO 2 gas sensing characteristics were measured. The silicon-based substrate embedded with Pt interdigitating electrodes and heater was prepared by MEMS technology. Vanadium pentoxide (V 2 O 5 ) was sputtered on the WO 3 thin film at room temperature. All the...
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