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High-precision stages are widely used in the semiconductor and flat panel industry. Because these stages have six degrees of freedom to control, coupling forces can deteriorate its control performance and stability. If heights of the center of gravity (CoG), the center of rotation (CoR), the actuation point, and the measurement point are not the same, couping between the x and θy motions occurs. In...
Speed and current closed loops control represent the heart of any advanced AC servo drive. These inner loops usually feature high-dynamic feedback control, with possible axes decoupling and a straight feedforward action of the back-electromotive force (back-EMF). More sophisticated techniques as single-rate or multi-rate control could be exploited for both speed and current closed loops, and their...
In a short-span seeking-mode of hard disk drives, the two-degree-of-freedom control is generally used. Authors' group proposed the perfect tracking control (PTC) method in order to achieve high accuracy and high speed controlling. We also proposed the learning PTC method which can suppress the overshoot by learning the tracking error in acceleration and deceleration period. In this paper, we propose...
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