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We present a novel design for nano-electromechanical systems (NEMS) in plane motion detection using suspended Si (p+) doped piezoresistive nanowire gauge transducers. The devices are electrostatically actuated by a lateral electrode and detected through piezoresistive transduction using a synchronous down-mixing principle. This geometry enables a first order piezoresistive detection with the suspended...
Both CMOS scaling and NEMS sensor devices scaling converge to the same type of sub 100 nm objects. This opens new fields of application for IC chips integrating both complex signal treatment and very highly sensitive sensing functionalities.
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