The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
In this paper, both a reactive co-sputtering process resulting in high optical quality AI2O3 thin films and a reactive ion etching process for defining low-loss rib waveguide structures are presented. The refractive index non-uniformity and the material birefringence are found to be below the limits of the applied method. Optical loss as low as 0.3 and 0.11 dB/cm at 633 and 1523 nm wavelength, respectively,...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.