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A low-sidelobe air-filled slot array is proposed and fabricated using silicon micromachining technology for millimeter-wave application. As is well known, the high-permittivity silicon prohibits the silicon-based antenna from having good performance. Here, this problem is addressed through manufacturing air-filled antenna on silicon substrate. An eight-way unequal power divider is adopted to excite...
This paper presents an air-cavity-fed four-element slot antenna array, which is fabricated using a modified silicon micromachining process. Different from traditional silicon micromachining process, the silicon dielectric is fully plated with gold without any silicon being exposed to the electromagnetic environment. In this modified silicon micromachining process, air cavities can be easily obtained...
In this paper, we have proposed a 60-GHz air cavity antenna array with checkerboard structure based on the MEMS silicon bulk micromachining technology. A one-to-four power divider with a Si-to-air transition is designed to excite an air-filled cavity antenna array. By properly arranging the four sub arrays, the proposed array is with a checkerboard structure. An in-phase radiating aperture which is...
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