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In this paper we have demonstrated the 12 inch (300 mm) wafer level fabrication and characterization of a laminated CoZrTa-based magnetic thin film stack with excellent magnetic and electrical properties. Clear magnetic anisotropy with low coercivity (∼0.3 Oe) and high permeability (∼500) were achieved. High resistivity (∼92.8 μΩ·cm) was also obtained for a four-fold lamination stack. Adhesive properties...
Horizontal probe station poses challenges in determining performance of vertical interposers for test socket. In this paper, a PCB test structure has been proposed for measurement of our designed interposers up to 20 GHz. A new test structure is further proposed and simulated with HFSS to achieve a higher operating frequency. By converting the S-parameters of test structures to T-parameters and splitting...
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