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The code with quasi-three-dimensional electromagnetic particle-in-cell plus Monte Carlo collision (PIC/MCC) method is developed for the research of ionization process of argon electron cyclotron resonance (ECR) discharge. Monte Carlo techniques are used on a large ensemble of charged particles to ensure accurate representation of the stochastic process. Recent work has focused on the effects of neutral...
In this work, the characters of electron distribution functions in ionization process of the argon ECR microwave discharge have been studied with the method of quasi-three-dimensional electromagnetic particle-in-cell plus Monte Carlo collision. The results of the particle simulation for the ECR discharge which include the features of electron energy distributions have been presented.
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