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This paper focuses on a structural suppression method of modal coupling error in micromachined gyroscopes by UV laser trimming. A micromachined gyroscope which had a slanted suspension beam was adopted as an example in the experiment. The formation mechanism of modal coupling error and operation principle of structural suppression method were proposed. Laser trimming method was implemented on the...
This paper presents the detailed analysis and preliminary design and experiment for close-loop self-compensation of the coupling error for silicon micromachined gyroscope. A closed-loop feedback control technology is adopted, which uses electrostatic force to counteract the change of coupling stiffness. The electrostatic force is generated by the detection variation of coupling error. Comparing with...
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