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This paper reports the design, realization and characterization of a novel double differential torsional MEMS accelerometer with improved temperature robustness. Based on the structure of conventional torsional accelerometers, normally composed of two unbalanced proof masses and an identical torsional beam, this work explores a torsional accelerometer with two structural optimizations aiming to improve...
This paper reports a new high sensitivity accelerometer with symmetrical double-sided serpentine beam-mass structure and fabricated with a novel pre-buried mask etching fabrication technology. To get the symmetrical double-sided beam with defined thickness, it needs to do the photolithograph on the deep etched wafer again in the etching process in the conventional fabricating methods. But the novel...
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