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This paper proposes two novel laterally-driven inertial switches with multi-directional constraint structures for lowering off-axis sensitivity. First one is the inertial switch with one layer of serpentine springs. The second is the inertial switch with two layers of serpentine springs. ANSYS software was used to simulate the dynamic contact process of inertial switch, and the simulation results...
A novel microelecromechnical system (MEMS) inertial switch based on the surface micromachining technology was developed, which mainly consists of a proof mass as the movable electrode and a compliant stationary electrode above the proof mass, whose deformation during the contact process would enhance the contact effect and prolong the switch-on time. Based on the original design which had already...
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