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This paper reports the design and characterization of a CNT based field emission x-ray source that affords a high spatial resolution. This work builds on a method reported at IEEE MEMS 2016, which was mainly focused on the fabrication process and material characterization. This paper will unveil more experimental results using for micro focus field emission x-ray source. A simplified imaging system...
This paper reports on a novel implanting micromachining technology. By using this method, for the first time, we could implant both ends of nano-scale materials into micro-scale metal materials at room temperature. Micro gas sensor with CNT bridging a pair of Au electrodes was fabricated. Direct contact and strong interactions between CNTs and the electrods contribute to its stable electronic performance...
This paper reports on a flexible Ni micro wire with CNTs embedded into its surface. By using micromachining technology, for the first time, we could implant nanoscale materials into micro-scale metal substrate at room temperature. Thanks to the effective direct contact and the strong interactions between CNTs and the substrate, field emission current of 1.11 mA (current density of 22.2 mA/cm2) could...
A room temperature fabrication method for the mass production of carbon nanotube (CNT) field emission micro-cathode arrays is reported. The technique combines electroplating of a CNT/Ni composite and micro-machining. This method combines the advantages of direct growth and screen printing conventionally used to fabricate such structures and avoids their disadvantages. Due to its integration and room...
We report here an effective method for the fabrication of a large number of carbon nanotube (CNT) triode-type micro-cathodes. Our technique combines composite electroplating and micromachining, avoiding the tedious direct growth and the screen-printing procedures conventionally used to fabricate such structures. The emitter structure is characterized by uniform diameters and heights, as well as by...
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