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MEMS-based programmable oscillators have emerged as a promising alternative to crystal-based frequency references, with previously reported work demonstrating sub-ps integrated jitter [1]. Here we show frequency stability better than ±0.5ppm from −40 to 85°C, along with Allan Deviation (i.e., long term jitter) better than 0.005 ppm for 0.1, 1, and 10 second strides. Since the MEMS resonator has a...
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