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This paper shows measurement of intraocular pressure (IOP) within a mouse eye. Three main challenges faced the development of a device for the measurement: the size of the mouse eye, the depth of the anterior chamber where the device will be implanted, and the maximum allowable incision size. These factors all limit the size of the device. In addition, a novel detection scheme is required which enables...
This paper presents an ultra-thin and flexible polymer-based capacitive pressure sensor for intraocular pressure (IOP) monitoring in a mouse eye. Due to the size limitation of the anterior chamber in the mouse eye, a volume of approximately 700 × 700 × 150 μm3 on a small substrate is available for the MEMS capacitive pressure sensor. Moreover, the sensor would ideally be easily injectable into place...
This paper presents the fabrication of an ultra-thin tag for identification and sensing applications in extremely small implantable regions. Particularly, we are demonstrating the capability to create a telemetry system which is implantable in a mouse eye. This system will eventually be able to monitor intraocular pressure (IOP). The small size of the mouse eye presents challenges for surgery and...
A novel all-Parylene based multilayer organic interposer for high-density 3D packaging is presented. The multilayer interposer consists of both a thick 50µm Parylene substrate layer as well as thin layers, down to ∼50 nm, which are formed by successive conformal thin-film deposition. The processing of the layers utilizes standard thin film techniques such as photolithography, dielectric/metal deposition,...
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