The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
This letter reports the design, fabrication, and performance of millimeter-wave transmission lines and devices in a tri-layer thick-copper (Cu) process. Beneath the Cu layers is a low-voltage lead zirconium titanate (PZT) MEMS stackup atop a nitride membrane, on high-resistivity silicon. The 10 μm thick Cu layers enable several transmission-line topologies, and the PZT-MEMS functionality enables tunability...
This paper presents Single Pole Double Throw (SP2T) and Single Pole Four Throw (SP4T) switches using piezoelectric micro-electro-mechanical (MEMS) switches measured from DC to 50 GHz. The overall performance of the switches shows better than 20 dB isolation up to 50 GHz when the MEMS switches are in the off or zero volt state. When the switches are actuated with 7 V, the SP2T shows less than 1.8 dB...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.