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We report on the development of a microtube electrode array as a neural interface device. To combine the desired properties for the neural interface device, such as low invasiveness with a small needle and a good signal-to-noise ratio in neural recordings, we applied the structure of a glass pipette electrode to each microtube electrode. The device was fabricated as sub-5-μm-diameter out-of-plane...
We have proposed fabricating very fine out-of-plane silicon-dioxide microtube arrays using a selective vapor–liquid–solid (VLS) growth technique and microfabrication processes. In this study, we elucidated the liquid-flow properties of microtubes with different inner diameters. Our fabricated microtubes were 0.5 μm in wall thickness; 20 μm in height; and either 2.5 μm, 4.1 μm, 4.6 μm, or 6.4 μm in...
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