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Recently, cost effectiveness and environmental consideration have become essential issues in the fabrication techniques. In this study, microlens array has been fabricated with simple processes. On a silicon substrate, which has circular micro holes, photoresist mixture has been coated using the spin coating process. The process has been conducted for various spin speeds to change the centrifugal...
This study investigates the fabrication process for microlens array using the solution of photoresist and solvent. A silicon substrate, where micro holes have been made in advance by deep reactive ion etch process, is coated with the solution of the photoresist and solvent. And the substrate is heated so that the solvent evaporates and the volume of the solution shrinks. Due to the surface tension...
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