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A piezoelectric micromachined ultrasonic transducers(pMUT) array as the emitter of micro audio directional loudspeaker is studied to examine the feasibility of realizing in portable multimedia devices. The array element is multilayered that the circular PZT thin film with Au electrodes is adhered to the silicon on insulator. The radius and thickness effects of PZT and Si layer are studied and focused...
This paper presents a novel piezoelectric micromachine ultrasound transducer (pMUT), consisted Pb(Zr,Ti)O3 (PZT) film on silicon membrane. The proposed micro-transducer is applied in an audio beam loudspeaker for mobile communication devices. At present, most of the portable productspsila energy supply are provided by battery, so the power consumption of the pMUT has been attracted more attention...
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