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This paper presents the new concept of RF MEMS silicon contact switch and its verification for high isolation at 50-110 GHz. A high isolation is achieved by locating the floating top contact electrode 30 ??m apart from the bottom coplanar waveguide (CPW) signal line in lateral direction at initial off-state. The switch contact is realized by the dual axis movement, namely a lateral movement by comb...
This letter presents a novel switchable composite right/left-handed (S-CRLH) metamaterial transmission line (TL) using MEMS switches. The proposed TL is based on a general CRLH TL with switchable capacitors and switchable shunt inductive stubs. The LH mode of the S-CRLH TL ranges from 7.5 GHz to 10.4 GHz. In these frequencies, the S-CRLH TL is able to switch from a negative phase response (phase lag)...
The performance of micro-electro-mechanical system (MEMS) metal switches were investigated at wide temperature range. Measurements were carried out using cryogenic probe station and S-parameters were taken using a network analyser for frequencies up to 20 GHz. A total of 28 switches were evaluated. The investigation shows a 50% increase in the actuation voltage and a decrease in the percentage of...
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