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Reflection gratings on Al2O3 channel waveguides were defined by focused ion beam milling. Fabry-Perot microcavities were fabricated and improved performance upon annealing was demonstrated, making them viable candidates as resonators for on-chip waveguide lasers.
Focused ion beam (FIB) milling is an emerging technology that enables fast, reliable and well-controlled nanometer-size feature definition. Since the method involves physical removal of material by a beam of ions, the technique can be adapted and optimized almost for any material system.
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