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BaTiO3 based thin films are evaluated for their Carbon dioxide sensing characteristics are been presented in this paper. The metal oxide films of 18nm, 37nm and 55 nm thicknesses are deposited on oxidized p-Si (100) substrate by RF-Sputtering. The effect of annealing on sensing properties is evaluated. The 55 nm thick unannealed films show the highest sensitivity of 10% for 500ppm of CO2, at an operating...
In this study, we have employed e-beam evaporation technique to evaluate the effect of O2 flow rate during evaporation on HfO2 films grown on Silicon substrates. We report the influence of oxygen flow rate on 32–40nm HfO2 films, by characterizing the chemical and electrical properties. It has been demonstrated that the films deposited at 3 SCCM O2 flow rate show better compositional and electrical...
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