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Using microwave-assisted synthesis in the solution medium, superparamagnetic, nanocrystalline cobalt ferrite thin films have been deposited on integrated inductors to increase inductance density. Cobalt ferrite thin films (CFTF), ∼820 nm thick, can be deposited in 10 min at ∼190°C, making the process CMOS-compatible. The as-prepared CFTF has a saturation magnetization (MS) of 238 emu/cc and coercivity...
Development towards the combination of miniaturization and improved functionality of RFIC has been stalled due to the lack of high-performance integrated inductors. To meet this challenge, integration of magnetic material with high permeability as well as low conductivity is a must. Ferrite films are excellent candidates for RF devices due to their low cost, high resistivity, and low eddy current...
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