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We have already proposed a simulation model for a 90-deg-tilted MEMS mirror, but in some reasons, numerical simulation methods for several angle counter electrode devices are not established. In order to solve these problems, we propose a cascade drive voltage signal technique and demonstrate a 51.5 deg tilted angle counter electrode and assure the effectiveness of the equivalence circuit.
We report a newly developed mixed-signal simulation tool for micro optoelectromechanical systems. Multi-physics signals in electrical, mechanical and optical domains are handed as electrical voltage or current in a circuit simulator Qucs, by implementing an equation-defined analytical model into the voltage-controlled current sources. This paper reports an equivalent circuit implementation of the...
This paper reports the design, fabrication and demonstration of MEMS electrostatic digital mirror array (8 channels) integrated with 40 V level-shifter drivers by the CMOS-first MEMS-last processing technique. A CMOS chip of high voltage level-shifter array (2.9 mm times 2.9 mm) was pre-fabricated on an 8-mum-thick SOI wafer, and micromechianical structures were post-processed by deep reactive ion...
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