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Capacitive Micromachined Ultrasonic Transducer (CMUT) is a type of micro-electro-mechanical system (MEMS) device which has the advantages such as ease of integration with front-end electronics and fabrication of uniform device arrays. The structure and fundamental working principle of a CMUT are similar to that of a parallel plate capacitor. When working in conventional mode, the deflection profiles...
Capacitive Micromachined Ultrasonic Transducer (CMUT) is a new type of ultrasound wave generator and detector. Analytical method is intuitive to understand the mechanism and physical effects through modeling of CMUT. To optimize the design procedures of CMUT membrane undergoing large deflection, a new analytical model with the consideration of the lateral force using Von Kármán equations is proposed...
This paper is to develop analytical models for the underwater capacitive micromachined ultrasonic transducer (CMUT) to understand its large deflection effect from the water pressure. To accurately model the displacement profile of the CMUT under the water pressure, Von Kármán equations and the perturbation method are employed to calculate the membrane deformation from a uniform pressure. The equations...
Multiple Helmholtz resonance apertures are proposed to enhance the output pressure of air-coupled capacitive micromachined ultrasonic transducers (CMUTs) for non-contact ultrasound imaging applications. The methodologies of defining the design parameters of CMUTs and the resonant apertures on the membrane of CMUTs are discussed. In comparing certain configurations of resonant apertures with conventional...
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