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Surface quality of fused silica, particularly surface defect and surface roughness, is a key factor affecting the performance of high‐power laser and short‐wave optical instrument, and so on. Herein, the super smooth surface of fused silica with roughness of sub‐angstrom level and exceedingly few submicron defects was achieved by using ultrafine nano‐CeO2 with primary particle size less than 4 nm,...
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