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MOEMS (Micro-Opto-Electro-Mechanical Systems) acoustic sensors are employed to detect acoustic emissions (AE) for Structural Health Monitoring (SHM). Acoustic sensing cantilevers (~200 × 100 × 50 μm) with variable frequency response, directionality and dynamic range can be fabricated in large quantity using a novel non-silicon process. The packaged sensors are low-cost,...
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