The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
In the present investigation, a commercial plasma CVD system suited for the deposition of titanium nitride (TiN) was adapted for alumina deposition up to substrate temperatures of 800°C.The investigations clearly demonstrated that activating the process gas by plasma lowers the temperature needed for the formation of hard alumina coatings. The properties of the alumina coatings depend strongly on...
In order to produce homogeneous hard coatings, e.g. titanium nitride, using the pulsed direct current plasma-assisted chemical vapour deposition technique, it is necessary to achieve a temporally and a spatially uniform plasma. In unipolar operation mode of the power supply, the spreading of the discharge is too slow under certain loading conditions. While the presence of this phenomenon is revealed...
Investigations of the development of discharges relevant for the production of titanium nitride (TiN) coatings using titanium tetrachloride (TiCl 4 ) as a feedstock gas have shown that under certain loading conditions the spreading of the discharge during the pulse is too slow. Recently, we have demonstrated that the ignition and spreading behaviour can be very much improved by the superposition...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.