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Bolometer-type uncooled infrared QVGAs (Quarter Video Graphics Arrays, namely, 320times240) were modified to improve their sensitivities at 3 THz. High transmission materials were investigated and it is found that high resistivity silicon with anti-reflection coating of Parylene or Silicon Dioxide is suitable. Using this material, THz lens was fabricated and handy THz camera which operates at TV frame...
On ion implantation, outgassing from photoresist coating wafer can induce a significant dose shift which can result in fluctuations of device characteristics within a wafer and/or in wafer-to-wafer. Pcomp, which is a system that compensates beam currents as a function of the beam line pressure, improves dose accuracy in implantation onto photoresist-coated wafers. Pcomp is effective even for medium...
We made a substrate type triple junction solar cell by using roll-to-roll PCVD machines. The triple junction solar cell consists of stainless steel substrate, silver (Ag)/zinc oxide (ZnO) back reflector, microcrystalline silicon (/spl mu/c-Si) bottom cell, microcrystalline silicon middle cell, amorphous silicon (a-Si) top cell, transparent conductive oxide layer (TCO), positive electrode and transparent...
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