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This paper reports an innovative and simple method to achieve highly linear capacitance vs. voltage response and large tuning ratio in a parallel-plate MEMS variable capacitor by moving the plate to the increasing-gap direction. The proposed structure adopted a levering actuator to achieve the opposite moving direction and large displacement of the top plate. The proposed MEMS variable capacitor,...
This paper reports an innovative method for maneuvering the pull-in voltage by adopting the coplanar pre-charged electrode to the conventional MEMS switch. In the simulated results (CoventorWare??), the initial pull-in voltage of 55 V was reduced to 5 V with a little change of the pull-in height. The proposed MEMS switch was properly fabricated with the surface micromachining. The fabricated switch...
Microelectromechanical (MEM) switch and MEM switch-based inverter was proposed and fabricated using a CMOS-compatible poly-Si surface micromachining process. The key concept is developed that the MEM switch-based inverter with the same implementation as CMOS inverter has a high noise immunity and low power dissipation because the MEM switch can clearly eliminate the leakage current when the device...
A DRAM-like mechanical non-volatile memory (NVM) is newly proposed and fabricated using CMOS-compatible poly-Si surface micromachining. The key concept is developed that the proposed memory is non-volatile because the MEMS switch can clearly eliminate the leakage current when the device is off. The mechanical NVM shows excellent on-off characteristics (sub-threshold swing~4 mV/decade), high switching...
The micromirror array with high fill-factor of 91% is fabricated. For high fill-factor, the posts supporting the mirror plate are filled up with copper by the uniform electroplating process
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