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Silicon quantum dots (QDs) thin films and superlattice embedded in SiC matrix are prepared by co-sputtering of pure Si and C targets for all silicon tandem solar cell application. The composition of as-deposited Si1-xCx precursor films can be controlled by changing rf power of Si and C targets, respectively. The composition x from 0 to 0.43 is investigated by changing C power from 0 to 400W under...
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