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Single-turn spiral inductors with magnetic material to enhance inductance are fabricated. Using double-layered Permalloy dots above and below the inductor metal, inductance improves and remains constant beyond 10 GHz with a Q factor around 11 and a peak frequency around 9 GHz. By employing single-turn small-sized inductors, the self-resonance frequency of the inductors is shifted to very high frequencies...
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