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Er–Si–O (Er 2 SiO 5 ) crystalline films are fabricated by the spin-coating and subsequent annealing process. The fraction of erbium is estimated to be 21.5 at% based on Rutherford backscattering measurement. X-ray diffraction pattern indicates that the Er–Si–O films are similar to Er 2 SiO 5 compound in the crystal structure. The fine structure of room-temperature photoluminescence...
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