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Recently, a new microengraving technology, microabrasive jet machining, has been studied as a machining technology for highly brittle materials. The technology implements the machining by using an abrasive jet and it uses mask structures to achieve microscale geometrical accuracy. The mask structure selectively blocks the abrasive jet at the portions of the surface that are not to be machined. Modeling...
Micro-abrasive jet machining (mu-AJM) has become a useful technique for micro-machining of a brittle material such as glass, silicon, etc. This technology is mainly based on the erosion of a mask which protects substrate against high velocity of micro-particles. Generally, for the fabrication of a mask in the mu-AJM process, a photomask based on the semi-conductor fabrication process was used. In...
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