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A micro flow sensor structure with multiple temperature sensing elements was considered and numerically simulated in considering wide range flow rate. The sensor response obtained from the temperature difference between the sensing elements depends on the geometrical parameters of the design and processing materials. In order to determine the optimal spacing distance between the sensing elements around...
The micro flow sensor with multiple temperature sensing elements on silicon substrate was proposed and fabricated for the flow sensor to measure wide flow range. To evaluate optimal spacing between central heater and each sensing element pair, a heat transfer equation in steady state was formulated to be finite difference equation in rectangular grid space. The numerical solutions using Excel Spreadsheet...
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