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This report provides a MEMS (micro-electromechanical systems) vibratory beam accelerometer (VBA) having a digital control system. The device structure with size of 5 times 5 mm2 includes a frame, heavy mass, thick suspension beams, and thin vibrating beams made of silicon. The VBA measures acceleration using the resonant frequency change of the supporting beams, which are designed to provide little...
This report provides a bulk-micromachined vibratory beam accelerometer. The device structure includes a frame, heavy mass, thick suspension beams and thin vibrating beams. The suspension beams are designed to be soft to the sensitive axis and hard to the off-axis. This brings about low off-axis sensitivity and high shock survivability. Combining with analog/digital mixed interface circuitry, the characteristics...
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