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We investigated the effects of electrically connecting multiple microresonators on the frequency noise with a goal to improve the resolution of a chemical sensor based on the capacitive micromachined ultrasonic transducer (CMUT) technology. We fabricated twenty-two 50-MHz CMUTs with varying number of cells and measured the input impedance characteristics. The impedance measurement results show a linear...
This paper reports on the experimental characterization of collapse-mode operation of capacitive micromachined ultrasonic transducers (CMUTs). CMUTs are conventionally operated by applying a direct current (DC) bias voltage less than the collapse voltage of the membrane, so that the membrane is deflected toward the bottom electrode. In the conventional regime, there is no contact between the membrane...
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