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We present a MEMS-based flexible subdural electrode array for neural recordings. The electrode array is fabricated on a composite substrate of polyimide and biomedical-grade polydimethylsiloxane(PDMS). The electrodes are deposited on polyimide layer, and the whole device is packaged by PDMS. Ablating with a CO2 laser is applied to expose the electrodes sites. The surface of the electrodes is modified...
We present implantable subdural electrode arrays (ISEA) for neural recordings based on MEMS technologies. The electrode array is fabricated on a thin polyimide substrate and then encapsulated with biomedical-grade polydimethylsiloxane (PDMS). Then laser ablating with a CO2 laser is applied to expose the electrode sites. Prototypes of 4times4 gold electrode arrays are fabricated with an exposed electrode...
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