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Size-controllable Si nanocrystals were fabricated by thermal annealing a-SiNx films that contain various Si/N ratios. The Raman spectra measurements show that the average grain size mainly relies on the Si/N ratios, and it can be reduced down to ~ 4nm by decreasing the Si/N ratio. It is also found that threshold crystallization temperature increases with the decrease in the Si/N ratios. The Fourier...
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