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Ag films were deposited on Al-doped ZnO (AZO) films and coated with AZO to fabricate AZO/Ag/AZO multilayer films by DC magnetron sputtering on glass substrates without heating of glass substrates. The best multilayer films have low sheet resistance of 19.8Ω/Sq and average transmittance values of 61% in visible region. It was found that the highest figure of merit (F TC ) is 6.9×10 −4 ...
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