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This paper presents for the first time (110) PMOS characteristics without Rext degradation, allowing investigation of fundamental mobility and demonstration of drive current Ion in excess of 1mA/mum at Ioff =100 nA/μm.
A systematic study of the impact of junction dose on N- and P-channel MOSFETs with 0.10 /spl mu/m effective channel lengths operating at 1.8V is reported. A non-monotonic dependence of saturated V/sub t/ roll-off on junction dose is observed with a minimum occurring for junction doses in the mid-10/sup 14/ cm/sup -2/ range. The degradation occurring at lower doses is caused by the lateral grading...
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