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This paper reports on the implementation of a closed-loop readout concept for a vibratory MEMS gyroscope. The system is based on electro-mechanical (el.-mech.) ΔΣ-modulation and implemented on an integrated circuit (ASIC) with incorporation of a field programmable gate array (FPGA) for rapid prototyping. The sense loop exhibits two modulation stages for the detection of the Coriolis-signal and thus...
This paper demonstrates a MEMS gyroscope system with extensive use of sigma-delta (ΣΔ) modulation in both, primary and secondary modes. The primary loop has a bandpass ΣΔ-digital-to-analog converter (DAC) driving the primary mass into resonance, which is implemented on a field programmable gate array (FPGA). With this strategy of shifting the primary oscillation control into the digital domain, the...
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